Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition.
| Autor: | Avila, Jason R., Qadri, Syed B., Freitas Jr., Jaime A., Nepal, Neeraj, Boris, David R., Walton, Scott G., Eddy Jr., Charles R., Wheeler, Virginia D. |
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| Zdroj: | Chemistry of Materials; Jun2019, Vol. 31 Issue 11, p3900-3908, 9p |
| Databáze: | Supplemental Index |
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