Insights into Laser Ablation Processes of Heterogeneous Samples: Toward Analysis of Through-Silicon-Vias.

Autor: Moreno-García, Pavel, Grimaudo, Valentine, Riedo, Andreas, Cedeño López, Alena, Wiesendanger, Reto, Tulej, Marek, Gruber, Cynthia, Lörtscher, Emanuel, Wurz, Peter, Broekmann, Peter
Zdroj: Analytical Chemistry; 6/5/2018, Vol. 90 Issue 11, p6666-6674, 9p
Databáze: Supplemental Index