Depth Profiling and Cross-Sectional Laser Ablation Ionization Mass Spectrometry Studies of Through-Silicon-Vias.
| Autor: | Grimaudo, Valentine, Moreno-García, Pavel, Cedeño López, Alena, Riedo, Andreas, Wiesendanger, Reto, Tulej, Marek, Gruber, Cynthia, Lörtscher, Emanuel, Wurz, Peter, Broekmann, Peter |
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| Zdroj: | Analytical Chemistry; 4/17/2018, Vol. 90 Issue 8, p5179-5186, 8p |
| Databáze: | Supplemental Index |
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