Deionization of Dopants in Silicon Nanofilms Even with Donor Concentration of Greater than 1019 cm-3.
Autor: | Takahisa Tanaka, Yuya Kurosawa, Naotoshi Kadotani, Tsunaki Takahashi, Shunri Oda, Ken Uchida |
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Zdroj: | Nano Letters; Feb2016, Vol. 16 Issue 2, p1143-1149, 7p |
Databáze: | Supplemental Index |
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