Deionization of Dopants in Silicon Nanofilms Even with Donor Concentration of Greater than 1019 cm-3.

Autor: Takahisa Tanaka, Yuya Kurosawa, Naotoshi Kadotani, Tsunaki Takahashi, Shunri Oda, Ken Uchida
Zdroj: Nano Letters; Feb2016, Vol. 16 Issue 2, p1143-1149, 7p
Databáze: Supplemental Index