| Autor: |
Thanh Hung Dinh, Yuhei Suzuki, Ryoichi Hirose, Hiroyuki Hara, Hayato Ohashi, Bowen Li, Dunne, Padraig, O'Sullivan, Gerry, Atsushi Sunahara, Takeshi Higashiguchi |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; 2014, Vol. 85 Issue 11, p1-3, 3p |
| Abstrakt: |
We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 µm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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