Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications.
| Autor: | Noor, Mimiwaty Mohd, Sugandi, Gandi, Aziz, Mohd Faizal, Majlis, Burhanuddin Yeop |
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| Zdroj: | 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014); 2014, p255-258, 4p |
| Databáze: | Complementary Index |
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