Novel submicron process development tool for SAW device fabrication.
| Autor: | Jacobs, Jim, Dufilie, Pierre |
|---|---|
| Zdroj: | 2014 IEEE International Ultrasonics Symposium; 2014, p2556-2559, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Jacobs, Jim, Dufilie, Pierre |
|---|---|
| Zdroj: | 2014 IEEE International Ultrasonics Symposium; 2014, p2556-2559, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|