Generalized trapping kinetic model for the oxide degradation after Fowler-Nordheim uniform gate...

Autor: Pananakakis, G., Ghibaudo, G., Papadas, C., Vincent, E., Kies, R.
Předmět:
Zdroj: Journal of Applied Physics; 9/1/1997, Vol. 82 Issue 5, p2548, 10p, 2 Diagrams, 4 Charts, 16 Graphs
Abstrakt: Demonstrates the practicality of modeling the power law degradation observed in thin dielectrics after Fowler-Nordheim stress on the basis of a generalized trapping approach with trap cross-section and density profiles. Use of incomplete Gamma and generalized hypergeometric functions; Spatial distributions; Variation of the trapped oxide charge.
Databáze: Complementary Index