Development of the technology to control the spatial distribution of plasma using double ICP coil.
| Autor: | Sakuishi, T., Murayama, T., Morikawa, Y., Suu, K. |
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| Zdroj: | 2014 IEEE 64th Electronic Components & Technology Conference (ECTC); 2014, p846-849, 4p |
| Databáze: | Complementary Index |
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