Fabrication of 2D-extruded fractal structures using repeated corner lithography and etching.
| Autor: | Berenschot, Erwin J. W., Yagubizade, Hadi, Jansen, Henri V., Dijkstra, Marcel, Tas, Niels R. |
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| Zdroj: | 9th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (NEMS); 2014, p374-377, 4p |
| Databáze: | Complementary Index |
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