Demonstration of a sidewall capacitor to evaluate dielectrics and metal barrier thin films.
| Autor: | Lin, Kevin L., Carver, Colin T., Chebiam, Ramanan, Clarke, James, Faber, Jacob, Harmes, Michael, Indukuri, Tejaswi, Jezewski, Christopher, Kobrinsky, Mauro, Krist, Brian, Lakamraju, Narendra, Lang, Hazel, Myers, Alan M., Plombon, John J., Singh, Kanwal Jit, Yoo, Hui Jae |
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| Zdroj: | IEEE International Interconnect Technology Conference; 2014, p177-180, 4p |
| Databáze: | Complementary Index |
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