Correlation study of white light interferometer measurements with atomic force microscope measurements for post-CMP dishing measurements applied to TSV processing.
| Autor: | Fisher, Daniel W., Timoney, Padraig, Yeong-Uk Ko, Vaid, Alok, Thangaraju, Sarasvathi, Smith, Daniel, Sung Pyo Jung, Alapati, Ramakanth, Wonwoo Kim, Peak, Jonathan, Amin, Hemant, Johnson, Tim |
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| Zdroj: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014); 2014, p270-273, 4p |
| Databáze: | Complementary Index |
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