Advancement of microelectronics-grade carbon nanotube materials for NRAM® device manufacture.
| Autor: | Lamb, James E., Gibbons, Stephen, Yongqing Jiang, Mangelson, Kay, Kremer, Kathryn, Janzen, Dan, Bledsoe, John, Boeser, Mathew |
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| Zdroj: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014); 2014, p125-129, 5p |
| Databáze: | Complementary Index |
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