MBIR characterization of Photosensitive Polyimide in high volume manufacturing.
| Autor: | Kagalwala, Taher E., Erwin, Brian M., Calero-DdelC, Victoria L., Brovman, Yuri M., Hoglund, Jonny |
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| Zdroj: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014); 2014, p46-50, 5p |
| Databáze: | Complementary Index |
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