Low contact resistances using carrier activation enhancement for Germanium CMOSFETs.

Autor: Miyoshi, Hidenori, Ueno, Tetsuji, Hirota, Yoshihiro, Yamanaka, Junji, Arimoto, Keisuke, Nakagawa, Kiyokazu, Kaitsuka, Takanobu
Zdroj: 2014 International Workshop on Junction Technology (IWJT); 2014, p1-5, 5p
Databáze: Complementary Index