Research on Micro-area Sheet Resistance by Mapping Technique Method with Inclined Square Four Point Probe.

Autor: Liu, Xinfu, Zhu, Zhihui, Zhang, Runli, Jiang, Nan, Guo, Huan
Zdroj: 2014 International Symposium on Computer, Consumer & Control; 2014, p548-550, 3p
Databáze: Complementary Index