Characterization and development of materials for an integrated high-temperature sensor using resistive test structures.
| Autor: | Tabasnikov, A., Bunting, A. S., Terry, J. G., Murray, J., Cummins, G., Zhao, C., Zhou, J., Fu, R. Y., Desmulliez, M. P. Y, Walton, A. J., Smith, S. |
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| Zdroj: | 2014 International Conference on Microelectronic Test Structures (ICMTS); 2014, p188-193, 6p |
| Databáze: | Complementary Index |
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