| Autor: |
Muenchausen, R. E., Hubbard, K. M., Foltyn, S., Estler, R. C., Nogar, N. S., Jenkins, C. |
| Předmět: |
|
| Zdroj: |
Applied Physics Letters; 2/5/1990, Vol. 56 Issue 6, p578, 3p |
| Abstrakt: |
Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O7-δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos3.5(θ) spread and composition varied with angle; in the perpendicular direction, more diffuse [cos1.5(θ)] plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
