Microwave Plasma Chemical Vapor Deposition of Diamond Films on Silicon From Ethanol and Hydrogen.

Autor: Zhi-bin, Ma, Jian-hua, Wang, Chuan-xin, Wang, Wei-dong, Man
Zdroj: Plasma Science & Technology; Apr2003, Vol. 5 Issue 2, p1-1, 1p
Databáze: Complementary Index