| Autor: |
Mannhart, J., Scheuermann, M., Tsuei, C. C., Oprysko, M. M., Chi, C. C., Umbach, C. P., Koch, R. H., Miller, C. |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 4/11/1988, Vol. 52 Issue 15, p1271, 3p |
| Abstrakt: |
Micron-wide lines of high Tc Y-Ba-Cu-O have been successfully patterned by ablating the films with a pulsed excimer laser. The high Tc films are mounted onto a computer-controlled stepping stage and irradiated with a demagnified image of a variable-size rectangular aperture. This technique has been used for fabricating features ranging from several centimeters in length to submicron in width without any degradation in Tc. For example, a superconducting microstructure of Y-Ba-Cu-O, nominally 1 μm wide and 2.5 μm long, with a Tc (R=0) of 88 K and a Jc of 5×104 A/cm2 at 4.2 K was fabricated. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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