| Autor: |
Witowski, Bob, Smith, W. Lee, Willenborg, David L. |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 2/22/1988, Vol. 52 Issue 8, p640, 3p |
| Abstrakt: |
We demonstrate the imaging of dislocations and stacking faults in silicon wafers in a noncontact, nondestructive fashion using laser based modulated optical reflectance. By comparison with conventional wet decoration etching, we show that the sensitivity of the modulated optical reflectance method can resolve the difference between two types of dislocations. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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