| Autor: |
Cong-Shun Wang, Jian Cao, Sheng Chang, Jing Fang, Zhen-Chuan Yang, Da-Cheng Zhang |
| Zdroj: |
International Journal of Nonlinear Sciences & Numerical Simulation; 2002, Vol. 3 Issue 3/4, p337-340, 4p |
| Abstrakt: |
In this paper, a novel bulk micromachined 1✕2 optical switch with optical fibre-holding structure is presented with the techniques of silicon-glass wafer bonding and deep reactive ion etch. The micromechanical optical switch includes two symmetrical slope anchors and a flexible beam with mirror, in which the beam is laterally driven by electrostatic actuator. It is important that the optimal design of this symmetrical slope anchor produces large displacement of the mirror with low driving voltage. The dynamic behavior of the switch is analyzed with Intellisuite by the coupling simulation of finite element and the boundary element, the switching time of the structure is also evaluated and the pull-in voltage is achieved by using a numerical iteration. Those optimization analyses offer a reasonable design for the optical switch based on the current fabrication technology. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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