| Autor: |
Hickel, Werner, Knoll, Wolfgang |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 9/24/1990, Vol. 57 Issue 13, p1286, 3p |
| Abstrakt: |
Optical waveguide microscopy is introduced as a novel imaging technique that allows for the microscopic characterization of thin-film samples by using guided optical waves as illumination light source. Excellent thickness (<1 nm) and good lateral resolution (<10 μm) is demonstrated. As a first application we image and analyze the two-dimensional thickness profile of a planar polymeric spun-on waveguide structure. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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