The annealing features of Ta/Si multilayer films.
| Autor: | Jiang, Lu, Gui-en, Zhou, Shu-yuan, Zhang, Yun-bo, Jia, Fan-qing, Li, Yun-lan, Huang, Shun, Tan, Lei, Shi, Yu-heng, Zhang |
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| Zdroj: | Acta Physica Sinica; Jul1994, Vol. 3 Issue 7, p1-1, 1p |
| Databáze: | Complementary Index |
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