Thin film thickness monitoring using a doubly oscillating quartz crystal and measurement of growth rate.
| Autor: | Kaushik, D. K., Chattopadhyaya, S. K., Nath, N. |
|---|---|
| Zdroj: | Journal of Physics E: Scientific Instruments; Mar1981, Vol. 14 Issue 3, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|