Epitaxial CoSi2 formation on (001)Si by reactive deposition.
| Autor: | Reader, A. H., Duchateau, J. P. W. B., Crombeen, J. E. |
|---|---|
| Zdroj: | Semiconductor Science & Technology; Jul1993, Vol. 8 Issue 7, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Reader, A. H., Duchateau, J. P. W. B., Crombeen, J. E. |
|---|---|
| Zdroj: | Semiconductor Science & Technology; Jul1993, Vol. 8 Issue 7, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|