CoSi2 formation on Si(100) using an amorphous Co-Ti alloy.

Autor: Duchateau, J. P. W. B., Crombeen, J. E., Lathouwers, E. G. C., Reader, A. H.
Zdroj: Semiconductor Science & Technology; Nov1992, Vol. 7 Issue 11, p1-1, 1p
Databáze: Complementary Index