Low-cost piezoresistive silicon load cell independent of force distribution.

Autor: Zwijze, Robert A. F., Wiegerink, Remco J., Krijnen, Gijs J. M., Lammerink, Theo S. J., Elwenspoek, Miko
Zdroj: Journal of Micromechanics & Microengineering; Jun2000, Vol. 10 Issue 2, p1-1, 1p
Databáze: Complementary Index