Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction.
| Autor: | Galayko, Dimitri, Kaiser, Andreas, Buchaillot, Lionel, Legrand, Bernard, Collard, Dominique, Combi, Chantal |
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| Zdroj: | Journal of Micromechanics & Microengineering; Jan2003, Vol. 13 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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