Improved quality of zinc oxide thin films by in situ annealing.
| Autor: | Bak-Mikkelsen, Erik, Reus, Roger de, Bouwstra, Siebe |
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| Zdroj: | Journal of Micromechanics & Microengineering; Mar1996, Vol. 6 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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