| Autor: |
Popov, Oleg A., Westner, August O., Drybanski, Antoni Z. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Oct92, Vol. 63 Issue 10, p4432, 7p |
| Abstrakt: |
Performance and characteristics of a microwave source designed for the generation of overdense (N[sub e] > N[sub cr] = 7.4 × 10[sup 10] cm[sup -3]) uniform plasmas are presented. Microwave power (f = 2.45 GHz, P=20-1000 W) was introduced into the cylindrical nonresonant (for any TE and TM microwave modes) cavity (D=8.25 cm, L=22 cm) via a matched dielectric window. Two magnetic coils produced the axial static magnetic field of B>B[sub ce]=875 G. Two plasma stream modes were observed: (i) narrow mode with a maximum plasma density on the axis, and with the magnetic field near the introduction window of B < 960 G; and (ii) wide mode with lower but uniform plasma density across the stream, and with magnetic fields near the window of 1000-1200 G. ion current density of 7-8 mA/cm² was typical for the narrow mode, and 4-5 mA/cm² for the uniform mode. Ion current density relationship with gas pressure and microwave power is discussed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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