| Autor: |
Tromp, R. M., Copel, M., Reuter, M. C., Horn von Hoegen, M., Speidell, J., Koudijs, R. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Nov91, Vol. 62 Issue 11, p2679, 5p |
| Abstrakt: |
We describe a new two-dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one-dimensional scattering angle detector, while—at the same time— the dose efficiency (count/μC) was improved by a factor 5-10. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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