Sputtering of a Cu solid by SiCl4 molecules.
| Autor: | Park, S. C., Stansfield, R. A., Clary, D. C. |
|---|---|
| Zdroj: | Journal of Physics D: Applied Physics; 7/14/1987, Vol. 20 Issue 7, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Park, S. C., Stansfield, R. A., Clary, D. C. |
|---|---|
| Zdroj: | Journal of Physics D: Applied Physics; 7/14/1987, Vol. 20 Issue 7, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|