An MBE growth facility for real-time in situ synchrotron x-ray topography studies of strained-layer III–V epitaxial materials.

Autor: Whitehouse, C. R., Barnett, S. J., Soley, D. E. J., Quarrell, J., Aldridge, S. J., Cullis, A. G., Emeny, M. T., Johnson, A. D., Clarke, G. F., Lamb, W., Tanner, B. K., Cottrell, S., Lunn, B., Hogg, C., Hagston, W.
Předmět:
Zdroj: Review of Scientific Instruments; Jan1992, Vol. 63 Issue 1, p634, 4p
Abstrakt: This paper describes a unique combined UHV MBE growth x-ray topography facility designed to allow the first real-time synchrotron radiation x-ray topography study of strainedlayer III-V growth processes. This system will enable unambiguous determination of dislocation nucleation and multiplication processes as a function of controlled variations in growth conditions, and also during post-growth thermal processing. The planned experiments have placed very stringent demands upon the engineering design of the system, and design details regarding the growth chamber; sample manipulator, x-ray optics, and real-time imaging systems are described. Results obtained during a feasibility study are also presented. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index