A simple profilometer for film thickness measurement.
| Autor: | Wood, J. W., Redin, R. D. |
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| Zdroj: | Review of Scientific Instruments; Aug1993, Vol. 64 Issue 8, p2405, 2p |
| Abstrakt: | A simple profilometer based upon a commercial strain gauge force transducer is described. It has been used on polymer film coated substrates to determine film thicknesses on the order of 10.0 u µm. Measured film thicknesses agree with gravimetrically determined values to within ±0.3 µm. [ABSTRACT FROM AUTHOR] |
| Databáze: | Complementary Index |
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