| Autor: |
Matey, J. R., Crandall, R. S., Brycki, B., Briggs, G. A. D. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Apr87, Vol. 58 Issue 4, p567, 4p |
| Abstrakt: |
We have developed an x-y-z scanning stage for mechanically scanned microscopy. The stage is constructed of "double-S" mode piezoelectric bimorphs. The prototype unit has a deflection seasitivity of 0.3 µm/V and a travel in each of the three axes of ± 60 µm. The lowest mechanical resonances of the stage are at 190, 220, and 360 Hz, corresponding to the x, y, and z axes of the stage, respectively. The noise level of the stage, when mounted on an isolation table, is ∼0.1 nm. The performance of the stage can be understood in terms of a simple lumped element model which can be used to optimize such stages for particular applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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