Site Specific TEM Specimen Preparation for Characterization of Extended Defects in 4H-SiC Epilayers.
| Autor: | Abadier, Mina, Myers-Ward, Rachael L., Song, Haizheng, Kurt Gaskill, D., Eddy, Chip R., Sudarshan, Tangali S., Picard, Yoosuf N., Skowronski, Marek |
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| Zdroj: | Microscopy & Microanalysis; Aug2014 Supplement, Vol. 20 Issue S3, p344-345, 2p |
| Databáze: | Complementary Index |
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