Projection x-ray lithography implemented using point sources.
| Autor: | Artyukov, I. A., Balakireva, L. L., Bijkerk, F., Vinogradov, Aleksandr V., Zorev, N. N., Kozhevnikov, I. V., Kondratenko, V. V., Ogurtsov, O. F., Ponomarenko, A. G., Fedorenko, A. I. |
|---|---|
| Zdroj: | Soviet Journal of Quantum Electronics; 1992, Vol. 22 Issue 2, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|