Resonant ionization of laser desorbed silicon.

Autor: Gibert, T., Gonthiez, T.
Předmět:
Zdroj: Journal of Applied Physics; 5/15/2003, Vol. 93 Issue 10, p5959, 7p, 1 Diagram, 4 Graphs
Abstrakt: Soft ultraviolet laser desorption of neutral and ionized Si atoms was investigated at 355 nm for fluences ranging from the desorption threshold (85 mJ/cm[SUB2] up to 165 mJ/cm[SUB2]. The sensitivity of resonance ionization mass spectrometry enabled the number of sputtered particles to be studied at a very low emission level corresponding to only several 100 atoms. For such a low emission yield, the ejected atoms keeps the memory of the laser-surface interaction mechanism during their flight in the ultrahigh vacuum condition. The velocity distribution of neutrals was measured for different fluences and were well fitted by a set of 2 Maxwellian functions at each fluence. From these fits it appears that the primary mechanisms involved in laser desorption are both a thermal process and an electronic one. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index