Diamond deposition by chemical vapor deposition process: Study of the bias enhanced nucleation...

Autor: Barrat, S., Saada, S., Dieguez, I., Bauer-Grosse, E.
Předmět:
Zdroj: Journal of Applied Physics; 8/15/1998, Vol. 84 Issue 4, p1870, 11p, 8 Black and White Photographs, 6 Diagrams, 3 Charts, 10 Graphs
Abstrakt: Presents information relating to the development of the bias enhanced nucleation (BEN) step in connection with the case of the synthesis of diamond films by the microwave plasma assisted chemical vapor deposition technique (MPCVD). Occurrence of treatment; What the scratching pretreatment leads to; Conducing of the different observations.
Databáze: Complementary Index