| Autor: |
Ashby, Carol I.H., Sullivan, John P. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 9/15/1997, Vol. 82 Issue 6, p3134, 3p, 4 Graphs |
| Abstrakt: |
Discusses the results of a study on the wet oxidation of AlGaAs in forming Al2O3. Reduction of H+ from water to hydrogen; Production of intermediate As2O3; Use of wet oxidation on metal-insulator-semiconductor applications; Kinetic balance between As2O3 formation; Near-total suppression of wet oxidation by O2. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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