Aluminide formation in polycrystalline Al/W metal/barrier thin-film bilayers: Reaction paths and...

Autor: Bergstrom, D.B., Petrov, I.
Předmět:
Zdroj: Journal of Applied Physics; 7/1/1997, Vol. 82 Issue 1, p201, 9p, 6 Black and White Photographs, 1 Diagram, 8 Graphs
Abstrakt: Reports that polycrystalline bcc W layers were grown on amorphous-SiO2/Si(001) substrates by ultrahigh vacuum magnetron sputter deposition. As-deposited Al/W bilayers; Annealed Al/W bilayers; Interfacial reaction pathway during the annealing of polycrystalline Al/W bilayers; Role of W surface orientation and grain boundaries on Al/W bilayer interaction kinetics.
Databáze: Complementary Index