Measurement of fly height by scattered total internal reflection.
Autor: | Lo, Jenny L., Sides, Paul J. |
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Předmět: | |
Zdroj: | Journal of Applied Physics; 4/17/1997, Vol. 81 Issue 8, p5381, 3p, 4 Graphs |
Abstrakt: | Demonstrates the sensitivity of scattered total internal reflection (SCATIR), an optical phenomenon that allows measurement of the fly height of sliders, to fly heights of 25 nm in commercial disk drives. Comparison between measurements made with SCATIR and nominal fly heights. |
Databáze: | Complementary Index |
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