Autor: |
Hatano, Hajime, Kanai, Sadao |
Předmět: |
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Zdroj: |
IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control; Jul96, Vol. 43 Issue 4, p531, 5p, 2 Black and White Photographs, 3 Diagrams, 5 Graphs |
Abstrakt: |
Focuses on the improvement of the transmission characteristics of a double-structured high-frequency tank utilizing oblique incidence of ultrasonic waves. Use of the tank for ultrasonic cleaning of semiconductor wafers and substrates; Relationship of the sound transmitivity through a plate in water and the angle of incidence; Measurement of an intensive and uniform sound pressure distribution. |
Databáze: |
Complementary Index |
Externí odkaz: |
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