High-frequency ultrasonic cleaning tank utilizing oblique incidence.

Autor: Hatano, Hajime, Kanai, Sadao
Předmět:
Zdroj: IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control; Jul96, Vol. 43 Issue 4, p531, 5p, 2 Black and White Photographs, 3 Diagrams, 5 Graphs
Abstrakt: Focuses on the improvement of the transmission characteristics of a double-structured high-frequency tank utilizing oblique incidence of ultrasonic waves. Use of the tank for ultrasonic cleaning of semiconductor wafers and substrates; Relationship of the sound transmitivity through a plate in water and the angle of incidence; Measurement of an intensive and uniform sound pressure distribution.
Databáze: Complementary Index