Very low power consumption MEMS scanner with alkali electret comb drive.
| Autor: | Sugiyama, Tatsuhiko, Aoyama, Mitsuru, Kawai, Keiko, Hashiguchi, Gen |
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| Zdroj: | 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS); 2014, p1229-1232, 4p |
| Databáze: | Complementary Index |
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