Continuous dynamic timing measurements to monitor spring and surface forces in MEMS switch reliability.
| Autor: | Kosla, Cezary, Fitzgerald, Padraig, Hill, Martin |
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| Zdroj: | 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS); 2014, p596-599, 4p |
| Databáze: | Complementary Index |
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