“assist-free”assembly technique of standing optical devices on soft spring actuator stages.
| Autor: | Oka, Yusaku, Shinozaki, Ryosuke, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Oohira, Fumikazu, Takao, Hidekuni |
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| Zdroj: | 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS); 2014, p433-436, 4p |
| Databáze: | Complementary Index |
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