Improved Design Methodology for the Development of Electrically Actuated MEMS Structures.

Autor: Prasad, AVSS, Venkatesh, K.P., Pratap, Rudra, Bhat, Navakanta
Zdroj: 2014 27th International Conference on VLSI Design & 2014 13th International Conference on Embedded Systems; 2014, p499-503, 5p
Databáze: Complementary Index