Deep Silicon Etching: Current Capabilities & Future Directions.
| Autor: | Westerman, Russ, Martinez, Linnell, Pays-Volard, David, Mackenzie, Ken, Lazerand, Thierry |
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| Zdroj: | Proceedings of SPIE; Nov2014, p1-14, 14p |
| Databáze: | Complementary Index |
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