Talbot Lithography as an Alternative for Contact Lithography for Submicron Features.
| Autor: | Dunbar, L. A., Nguyen, D., Timotijevic, B., Vogler, U., Veseli, S., Bergonzi, G., Angeloni, S., Bramati, A., Voelkel, R., Stanley, R. P. |
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| Zdroj: | Proceedings of SPIE; Nov2014, p1-8, 8p |
| Databáze: | Complementary Index |
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